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Semiconductor Clearooms: Class 1, Class 10, Class 100 and up CFD Case Study: Improvement of Airflow Performance in a semiconductor FAB
To perform Computational Fluid Dynamics (CFD) analysis to study and improve the airflow laminarity, temperature, pressure, humidity and/or chemical concentration performance in the semiconductor cleanrooms. Poor Airflow Laminarity Before Improvement
Good Airflow Laminarity After Improvement |